Method and system for reducing operational shock sensitivity...

Details Method and system for reducing operational shock sensitivity... Method and system for reducing operational shock sensitivity...

2006-08-29

2006-08-29

Gray, David M. (Department: 2855)

Measuring and testing

Specimen stress or strain, or testing by stress or strain...

Specified electrical sensor or system

C073S012040

Reexamination Certificate

active

07096741

ABSTRACT:
A method and system for reducing operational shock sensitivity of a MEMS device includes a closed-loop control circuit for controlling the MEMS device and a shock detector for detecting a shock experienced by the MEMS device. The closed-loop control circuit includes a movable MEMS structure, a detector for sensing a position of the MEMS structure and for providing a first feedback signal related to the sensed position, and a processor for receiving the first feedback signal and for providing a control signal used to control the MEMS device. The shock detector, which according to a preferred embodiment is the MEMS structure itself, is used for detecting the shock experienced by the MEMS device and for generating a second feedback signal, which is used to alter the control signal such that a response of the closed-loop control circuit to the shock is minimized.

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