Method and system for quantifying the step profile...

Details Method and system for quantifying the step profile... Method and system for quantifying the step profile...

2005-12-27

2005-12-27

Paladini, Albert W. (Department: 2125)

Data processing: structural design, modeling, simulation, and em

Modeling by mathematical expression

C356S635000, C382S145000

Reexamination Certificate

active

06980937

ABSTRACT:
A method and system for quantifying profile characteristics of semiconductor devices, including receiving profile data for a device under evaluation and isolating from the profile data a region indicating a profile edge. The profile edge data is rotated by ninety degrees to become rotated profile edge data. The non-rotated profile edge data or rotated profile edge data is then used to calculate at least one geometric parameter describing the profile edge.

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