Method and system for providing a compensated auger spectrum

Details Method and system for providing a compensated auger spectrum Method and system for providing a compensated auger spectrum

2011-03-22

2011-03-22

Nghiem, Michael P (Department: 2857)

Data processing: measuring, calibrating, or testing

Measurement system in a specific environment

Mechanical measurement system

C250S399000

Reexamination Certificate

active

07912657

ABSTRACT:
A system for providing a compensated Auger spectrum, the system includes: a processor, adapted to generate a compensated Auger spectrum in response to a non-compensated Auger spectrum and in response to an electric potential related parameter, and an interface to an electron detector that is adapted to detect electrons emitted from the first area, wherein the interface is connected to the processor, and wherein the electric potential related parameter reflects a state of a first area of an object that was illuminated by a charged particle beam during the generation of the non-compensated Auger spectrum.

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patent: 6946654 (2005-09-01), Gerlach et al.
patent: 7456399 (2008-11-01), Soderstrom
Patterson et al., A Non Contact Voltage Measurement Technique Using Auger Spectroscopy, 1983 IEEE/IRPS, pp. 150-152.
Oswald et al., Factor Analysis and XPS-Data Preprocessing for Non-conducting Samples, 1999, Fresenius J Anal Chem 365, pp. 59-62.

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