Data processing: measuring – calibrating – or testing – Measurement system – Statistical measurement
Reexamination Certificate
2005-11-15
2005-11-15
Barlow, John (Department: 2863)
Data processing: measuring, calibrating, or testing
Measurement system
Statistical measurement
Reexamination Certificate
active
06965844
ABSTRACT:
A method and system for processing stability of semiconductor devices. The method includes providing a first plurality of semiconductor devices, providing a second plurality of semiconductor devices, obtaining a first plurality of measured values corresponding to a characteristic, and obtaining a second plurality of measured values corresponding to the characteristic. Additionally, the method includes performing a first statistical analysis for the first plurality of measured values, determining a first statistical distribution, performing a second statistical analysis for the second plurality of measured values, and determining a second statistical distribution. Moreover, the method includes processing information associated with the first statistical distribution and the second statistical distribution, and determining an indicator. Also, the method includes processing information associated with the indicator, determining a confidence level, processing information associated with the confidence level, and determining whether the characteristic is stable.
REFERENCES:
patent: 6792386 (2004-09-01), Dobson
patent: 2003/0229462 (2003-12-01), Wang
Wang, “Sameness-An Equivalency Index of Products, Processes and Services,” 2002 Hawaii International Conference on Statistics, Jun. 5-9, 2002, 5 pages total.
Ni Jinghua
Wang Eugene
Barlow John
Lau Tung
Semiconductor Manufacturing International (Shanghai) Corporation
Townsend and Townsend / and Crew LLP
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