Method and system for packaging a MEMS device

Details Method and system for packaging a MEMS device Method and system for packaging a MEMS device

2007-02-27

2007-02-27

Thompson, Timothy (Department: 2873)

Optical: systems and elements

Optical modulator

Having particular chemical composition or structure

C359S223100, C359S224200

Reexamination Certificate

active

11045800

ABSTRACT:
A MEMS-based display device is described, wherein an array of interferometric modulators are configured to reflect light through a transparent substrate. The transparent substrate is sealed to a backplate and the backplate can contain electronic circuitry for controlling the array of interferometric modulators. The backplate can provide physical support for device components, such as electronic components which can be used to control the state of the display. The backplate can also be utilized as a primary structural support for the device.

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