Method and system for optical measurement via a resonator...

Details Method and system for optical measurement via a resonator... Method and system for optical measurement via a resonator...

2007-03-20

2007-03-20

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

By light interference

Having partially reflecting plates in series

C356S511000

Reexamination Certificate

active

10770866

ABSTRACT:
A method and system for optical measurement via a resonator having a non-uniform phase profile provides a mechanism for measuring and/or detecting sub-micron surface features with increased resolution. A second surface forming part of a resonator is illuminated through a first partially reflective surface that has a non-uniform phase profile that transitions from negative to positive phase with respect to a resonance phase value of the resonator. As a result, a reduced spot size is produced at the second surface, which enhances the resolution of a measurement and/or detection of surface features on the second surface. Additionally, if a discontinuity is provided in the non-uniform phase profile, interaction of the discontinuity with surface features of the second surface will provide enhanced resolution of the surface features. The resolution of the system is improved over the resolution that can be attained using a Fabry-Perot resonator.

REFERENCES:
patent: 6522471 (2003-02-01), Clark
patent: 6653649 (2003-11-01), Clark
patent: 6717707 (2004-04-01), Clark
patent: 6778307 (2004-08-01), Clark
patent: 2005/0236589 (2005-10-01), Brunfeld et al.

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