Method and system for operating capacitive membrane...

Details Method and system for operating capacitive membrane... Method and system for operating capacitive membrane...

2007-09-25

2007-09-25

Pert, Evan (Department: 2826)

Communications, electrical: acoustic wave systems and devices

Signal transducers

C310S324000, C310S334000, C600S437000, C600S459000

Reexamination Certificate

active

11094874

ABSTRACT:
A novel operation regime for capacitive micromachined ultrasonic transducers (cMUTs). The collapse-snapback operation in which the center of the membrane makes intermittent contact with the substrate. This combines two distinct states of the membrane (in-collapse and out-of-collapse) to unleash unprecedented acoustic output pressures into the medium. The collapse-snapback operation utilizes a larger range of membrane defection profiles (both collapsed and released membrane profiles) and generates higher acoustic output pressures than the conventional operation. Collapse-snapback operation meets the extreme acoustic transmit pressure demands of the ultrasonic industry.

REFERENCES:
patent: 2005/0200241 (2005-09-01), Degertekin
patent: 2005/0219953 (2005-10-01), Bayram et al.
patent: 2006/0279174 (2006-12-01), Oliver et al.

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