Method and system for operating a MEMS scanner on a resonant...

Details Method and system for operating a MEMS scanner on a resonant... Method and system for operating a MEMS scanner on a resonant...

2011-03-15

2011-03-15

Mis, David (Department: 2817)

Oscillators

Automatic frequency stabilization using a phase or frequency...

With reference oscillator or source

C331S00100A, C331S017000, C331S025000, C331S154000, C331S155000

Reexamination Certificate

active

07907019

ABSTRACT:
A method for operating a micro-electro-mechanical system (MEMS) scanner on a resonant mode frequency is provided. The method includes generating a drive signal for a MEMS scanner. A sensor signal is received from the MEMS scanner. The drive signal is compared to the sensor signal. An accumulated correction signal is generated based on the comparison of the drive signal and the sensor signal. The drive signal for the MEMS scanner is then adjusted based on the accumulated correction signal.

REFERENCES:
patent: 6856712 (2005-02-01), Fauver et al.
patent: 6995622 (2006-02-01), Partridge et al.
patent: 2005/0179976 (2005-08-01), Davis et al.
patent: 2007/0273794 (2007-11-01), Sprague et al.
Chuanwei Wang, et al., “Implementation of phase-locked loop control for MEMS scanning mirror using DSP”, ScienceDirect, Sensor and Actuators A 133, 2007, p. 243-249.
Randy Sprague, et al., “Bi-axial magnetic drive for Scanned Beam Display mirrors”, Proc. of SPIE, vol. 5721, 2005, p. 1-13.
Pablo Gomez, “State-of-the-art of MEMS Technology for Design and Fabrication of Micro-Mirrors”, Florida International University, Advanced Electronics Systems I, Spring 2003, 12 pages.
Shorya Awtar, et al., “Two-Axis Optical MEMS Scanner”, 4 pages; 2005; Proc . ASPE 2005 Annual Meeting; paper No. 1800.

Affiliated with

Also associated with

Rating

Method and system for operating a MEMS scanner on a resonant... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method and system for operating a MEMS scanner on a resonant..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and system for operating a MEMS scanner on a resonant... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2632535