Method and system for non-destructive distribution profiling...

Details Method and system for non-destructive distribution profiling... Method and system for non-destructive distribution profiling...

2005-08-31

2008-08-12

Vanore, David A. (Department: 2881)

Radiant energy

Electron energy analysis

C250S306000, C250S307000

Reexamination Certificate

active

07411188

ABSTRACT:
A method to determine a distribution profile of an element in a film. The method comprises exciting an electron energy of an element deposited in a first film, obtaining a first spectrum associating with the electron energy, and removing a background spectrum from the first spectrum. Removing the background value generates a processed spectrum. The method further includes matching the processed spectrum to a simulated spectrum with a known simulated distribution profile for the element in a film comparable to the first film. A distribution profile is obtained for the element in the first film based on the matching of the processed spectrum to a simulated spectrum selected from the set of simulated spectra.

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