Radiant energy – Electron energy analysis
Reexamination Certificate
2011-02-08
2011-02-08
Nguyen, Kiet T (Department: 2881)
Radiant energy
Electron energy analysis
Reexamination Certificate
active
07884321
ABSTRACT:
A method to determine a distribution profile of an element in a film. The method comprises exciting an electron energy of an element deposited in a first film, obtaining a first spectrum associating with the electron energy, and removing a background spectrum from the first spectrum. Removing the background value generates a processed spectrum. The method further includes matching the processed spectrum to a simulated spectrum with a known simulated distribution profile for the element in a film comparable to the first film. A distribution profile is obtained for the element in the first film based on the matching of the processed spectrum to a simulated spectrum selected from the set of simulated spectra.
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Ballance David Stephen
deCecco Paola
Kwan Michael
Reed David
Schueler Bruno
Blakely , Sokoloff, Taylor & Zafman LLP
Nguyen Kiet T
Revera Incorporated
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