Method and system for nanoscale plasma processing of objects

Details Method and system for nanoscale plasma processing of objects Method and system for nanoscale plasma processing of objects

2004-08-09

2008-12-30

Hassanzadeh, Parviz (Department: 1792)

Coating apparatus

Gas or vapor deposition

Having means to expose a portion of a substrate to coating...

C156S345300

Reexamination Certificate

active

07470329

ABSTRACT:
A plasma processing system includes a source of plasma, a substrate and a shutter positioned in close proximity to the substrate. The substrate/shutter relative disposition is changed for precise control of substrate/plasma interaction. This way, the substrate interacts only with a fully established, stable plasma for short times required for nanoscale processing of materials. The shutter includes an opening of a predetermined width, and preferably is patterned to form an array of slits with dimensions that are smaller than the Debye screening length. This enables control of the substrate/plasma interaction time while avoiding the ion bombardment of the substrate in an undesirable fashion. The relative disposition between the shutter and the substrate can be made either by moving the shutter or by moving the substrate.

REFERENCES:
patent: 6045671 (2000-04-01), Wu et al.
patent: 6132805 (2000-10-01), Moslehi
patent: 6911129 (2005-06-01), Li
patent: 2003/0075273 (2003-04-01), Kilpela et al.
patent: 61235558 (1986-10-01), None

Affiliated with

Also associated with

Rating

Method and system for nanoscale plasma processing of objects does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method and system for nanoscale plasma processing of objects, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and system for nanoscale plasma processing of objects will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4035022