Method and system for monitoring component consumption

Details Method and system for monitoring component consumption Method and system for monitoring component consumption

2007-06-19

2007-06-19

Wachsman, Hal (Department: 2857)

Data processing: measuring, calibrating, or testing

Measurement system

Performance or efficiency evaluation

C702S155000, C702S159000, C702S170000, C702S172000, C250S559270, C356S503000, C356S630000

Reexamination Certificate

active

10767347

ABSTRACT:
A method for monitoring consumption of a component, including the steps of emitting a radiation beam onto a first area of the component and detecting a portion of the radiation beam that is refracted by the component. A radiation level signal is generated based at least on a strength of the detected portion of the radiation beam, and a thickness of the component is determined based on the radiation level signal. The thickness of the component is compared to a predetermined thickness value, and a status signal is generated when the comparing step determines that the thickness of the component is substantially equal to or below the predetermined thickness value. When the comparing step determines that the thickness of the component is greater than the predetermined thickness value, the component is exposed to a process that can erode at least a portion of the component.

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