Method and system for measuring the topography of a sample

Details Method and system for measuring the topography of a sample Method and system for measuring the topography of a sample

2005-09-06

2005-09-06

Stafira, Michael P. (Department: 2877)

Optics: measuring and testing

Shape or surface configuration

Triangulation

C356S612000, C250S23700G

Reexamination Certificate

active

06940609

ABSTRACT:
An imaging method and system are presented for detecting the topography of a sample surface. Illuminating light is directed to the sample by sequentially passing the illuminating light through a grating and an objective lens arrangement The grating has a pattern formed by spaced-apart transparent regions spaced by non-transparent regions, and is specifically oriented with respect to the optical axis of the objective lens arrangement. Light, specularly reflected from the sample, is collected by the same objective lens arrangement and is directed to an imaging detector through the same grating, thereby enabling creation of an image of the illuminated sample indicative of the topography of the sample surface.

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