Method and system for measuring the diameter of an electron beam

Details Method and system for measuring the diameter of an electron beam Method and system for measuring the diameter of an electron beam

1980-06-26

1982-06-22

Krass, Errol A.

Boots, shoes, and leggings

364563, 250397, G01N 2300

Patent

active

043365973

ABSTRACT:
A method of measuring the diameter of an electron beam in which the electron beam diameter is measured from the leading edge or trailing edge of a detector signal that is obtained as the mark area formed on the specimen is scanned by the electron beam. This method comprises the following steps: scanning the specimen by the electron beam at least once to find the maximum and minimum values of the detector signal; setting two threshold levels based on the maximum and minimum values; scanning the mark area by the electron beam to measure the time interval during which the level of the detector signal is within the two threshold levels; and calculating the beam diameter.

REFERENCES:
patent: 3909612 (1975-09-01), Gibbard
patent: 3949228 (1976-04-01), Ryan
patent: 4004149 (1977-01-01), Sato et al.
patent: 4086491 (1978-04-01), Vaughan
patent: 4199689 (1980-04-01), Takigawa
patent: 4233515 (1980-11-01), Dietrich et al.

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