Method and system for measuring physical parameters with a...

Details Method and system for measuring physical parameters with a... Method and system for measuring physical parameters with a...

2006-12-14

2010-02-16

Benson, Walter (Department: 2837)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S323210, C310S336000

Reexamination Certificate

active

07663295

ABSTRACT:
A piezoelectric bimorph cantilever is used for determining physical parameters in a gaseous or liquid environment. The sensor works as a driven and damped oscillator. Contrary to common cantilever sensor systems, the piezoelectric film of the bimorph cantilever acts as both a sensor and an actuator. Using at least two resonance mode of the bimorph cantilever, at least two physical parameters can be measured simultaneously in a gas or a liquid. An optimized piezoelectric cantilever and a method to produce the cantilever are also described.

REFERENCES:
patent: 4144747 (1979-03-01), Datwyler
patent: 4554927 (1985-11-01), Fussell
patent: 5089695 (1992-02-01), Willson et al.
patent: 5379639 (1995-01-01), Hulsing, II et al.
patent: 5458000 (1995-10-01), Burns et al.
patent: 5511427 (1996-04-01), Burns
patent: 5903380 (1999-05-01), Motamedi et al.
patent: 6781285 (2004-08-01), Lazarus et al.
patent: 2002/0044327 (2002-04-01), Fujita et al.
patent: 2002/0182589 (2002-12-01), Knudsen et al.
patent: 2003/0032293 (2003-02-01), Kim et al.
patent: 2007/0089515 (2007-04-01), Shih et al.
Rasmussen, P.A., et al., “Optimised Cantilever Biosensor With Piezoresistive Read-Out,” Ultramicroscopy 97, (2003), pp. 371-376.
Sandberg, R., et al., “Temperature and Pressure Dependence of Resonance in Multi-Layer Microcantilevers,” Journal of Micromechanics and Microengineering, 15 (2005), pp. 1454-1458.
Chen, G.Y. et al., “Resonance Response of Scanning Force Microscopy Cantilevers,” Rev. Sci. Instrum., vol. 65, No. 8, Aug. 1994, pp. 2532-2537.
DeVoe, Don L., et al., “Modeling and Optimal Design of Piezoelectric Cantilever Microactuators,” Journal of Microelectromechanical Systems, vol. 6, No. 3, Sep. 1997, pp. 266-270.
Wang, Zheyao, et al., “A Temperature Insensitive Quartz Resonator Force Sensor,” Meas. Sci. Technol. 11 (2000), pp. 1565-1569.
Mertens, Johann, “Effects of Temperature and Pressure on Microcantilever Resonance Response,” Ultramicroscopy 97 (2003), pp. 119-126.
Cullen, D.E., “Measurement of Saw Velocity Versus Strain For YX,” Ultrasonics Symposium Proceedings, IEEE Cat. #75, CHO 994-4SU (1975), pp. 519-522.
Landau, L.D., et al., “Theory of Elasticity, 3rdEdition,” Institute of Physical Problems, USSR Academy of Sciences, Moscow USSR, pp. 99-103, Jan. 15, 1986.

Affiliated with

Also associated with

Rating

Method and system for measuring physical parameters with a... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method and system for measuring physical parameters with a..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and system for measuring physical parameters with a... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4188660