Thermal measuring and testing – Temperature measurement – By a vibratory effect
Reexamination Certificate
2011-03-29
2011-03-29
Caputo, Lisa M (Department: 2855)
Thermal measuring and testing
Temperature measurement
By a vibratory effect
C073S024060, C073S064530, C073S704000
Reexamination Certificate
active
07914203
ABSTRACT:
A piezoelectric bimorph cantilever is used for determining physical parameters in a gaseous or liquid environment. The sensor works as a driven and damped oscillator. Contrary to common cantilever sensor systems, the piezoelectric film of the bimorph cantilever acts as both a sensor and an actuator. Using at least two resonance mode of the bimorph cantilever, at least two physical parameters can be measured simultaneously in a gas or a liquid. An optimized piezoelectric cantilever and a method to produce the cantilever are also described.
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Mortet Vincent
Petersen Rainer
Caputo Lisa M
IMEC
Jagan Mirellys
McDonnell Boehnen & Hulbert & Berghoff LLP
Universiteit Hasselt
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