Method and system for measurement data evaluation in...

Details Method and system for measurement data evaluation in... Method and system for measurement data evaluation in...

2006-10-10

2008-09-02

Barlow, John E. (Department: 2863)

Data processing: measuring, calibrating, or testing

Measurement system in a specific environment

Quality evaluation

C702S082000, C702S083000, C702S084000, C702S181000, C438S010000, C438S012000, C438S018000

Reexamination Certificate

active

07421358

ABSTRACT:
By performing a contingency-based correlation test of measurement data, such as defect data, with respect to electrical test data after progressively filtering the measurement data, an enhanced analysis of process flow characteristics may be accomplished. Consequently, an efficient yield loss estimation may be performed.

REFERENCES:
patent: 5866437 (1999-02-01), Chen et al.
patent: 5991699 (1999-11-01), Kulkarni et al.
patent: 2004/0175943 (2004-09-01), Waksman
patent: 2005/0194590 (2005-09-01), Matsushita et al.
patent: 196 13 615 (1996-04-01), None

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