Method and system for mask fabrication process control

Details Method and system for mask fabrication process control Method and system for mask fabrication process control

2007-07-18

2011-12-20

Cosimano, Edward (Department: 2857)

Data processing: measuring, calibrating, or testing

Measurement system in a specific environment

Quality evaluation

C438S015000, C700S051000, C700S109000, C700S121000, C702S187000, C702S189000, C716S054000

Reexamination Certificate

active

08082119

ABSTRACT:
A method for controlling mask fabrication is provided, wherein the method uses statistical process control analysis. A manufacturing model is defined. A process run of a mask is performed as defined by the manufacturing model. A fault detection analysis is performed to reduce a bias in the manufacturing model. A fine-tuning signal is generated in response to a result of the fault detection analysis. The process run operation is adjusted according to the fine-tuning signal.

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