Method and system for mask fabrication process control

Details Method and system for mask fabrication process control Method and system for mask fabrication process control

2007-08-21

2007-08-21

Cabrera, Zoila (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S110000, C702S083000

Reexamination Certificate

active

10792246

ABSTRACT:
A mask fabrication system. The mask fabrication system contains a processing tool, a metrology tool, and a controller. The processing tool processes a mask. The metrology tool inspects the mask to obtain an inspection result. The controller generates a manufacturing model of the processing tool and calibrates the manufacturing model according to a device data, a material data, and the inspection result of the mask.

REFERENCES:
patent: 6114695 (2000-09-01), Todokoro et al.
patent: 6883158 (2005-04-01), Sandstrom et al.

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