Method and system for locally buffering substrate carriers...

Details Method and system for locally buffering substrate carriers... Method and system for locally buffering substrate carriers...

2008-02-18

2011-11-01

Keenan, James (Department: 3652)

Material or article handling

Process

Of charging load-holding or -supporting element from source...

C414S222070, C414S940000

Reexamination Certificate

active

08047762

ABSTRACT:
By providing an overhead buffer system between an automatic transport system and a load port assembly of a process tool, the efficiency of the respective load ports may be significantly enhanced, for instance, by reducing the idle time of empty carriers, thereby providing the potential for covering a wider range of operational scenarios compared to conventional strategies. For instance, for the same number of load ports, the overhead buffer system may provide a continuous operation, even if small lot sizes are used. The buffer system may comprise a dedicated transport mechanism for directly serving the load ports and respective buffer places, while respective transfer places may provide direct interaction with the automated transport system.

REFERENCES:
patent: 5570990 (1996-11-01), Bonora et al.
patent: 6009890 (2000-01-01), Kaneko et al.
patent: 6169935 (2001-01-01), Iwasaki et al.
patent: 6183184 (2001-02-01), Shiwaku
patent: 6280134 (2001-08-01), Nering
patent: 6336546 (2002-01-01), Lorenz
patent: 6540466 (2003-04-01), Bachrach
patent: 7024275 (2006-04-01), Lai
patent: 7261510 (2007-08-01), Motoori et al.
patent: 7413396 (2008-08-01), Ito
patent: 7441999 (2008-10-01), Nakao et al.
patent: 7771151 (2010-08-01), Bonora et al.
patent: 7780020 (2010-08-01), Yoshitaka
patent: 7887278 (2011-02-01), Hoshino
patent: 7891929 (2011-02-01), Yamamoto et al.
patent: 7972104 (2011-07-01), Shiwaku et al.
patent: 2003/0190223 (2003-10-01), Peiter
patent: 2004/0109746 (2004-06-01), Suzuki
patent: 2005/0191162 (2005-09-01), Chang et al.
patent: 2006/0051192 (2006-03-01), Fujiki
patent: 2006/0088272 (2006-04-01), Gilchrist et al.
patent: 2006/0222479 (2006-10-01), Shiwaku et al.
patent: EP 1 627 834 (2006-02-01), None
Letter from foreign associate mailed May 13, 2008.
Translation of Official Communication issued Mar. 10, 2008.
Letter from foreign associate mailed Aug. 9, 2011.
Translation of Official Communication issued Aug. 1, 2011.

Affiliated with

Also associated with

Rating

Method and system for locally buffering substrate carriers... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method and system for locally buffering substrate carriers..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and system for locally buffering substrate carriers... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4295791