Material or article handling – Device for emptying portable receptacle – Nongravity type
Patent
1986-10-28
1989-12-12
Werner, Frank E.
Material or article handling
Device for emptying portable receptacle
Nongravity type
414627, 4147448, 414225, 414217, 414737, 414680, 414752, 901 6, B65G 4791
Patent
active
048864129
ABSTRACT:
A wafer transport system includes a mobile frame, a wafer cassette conveyor, a wafer support table, and a wafer transfer assembly. The wafer cassette conveyor carries a plurality of wafer cassettes and presents them successively to a transfer location. The wafer transport assembly, including a robotic arm and a vacuum pickup element, is then able to transport individual wafers from the cassettes to the support table. By rotating the support table, a plurality of wafers can be placed in a desired order. The wafer support table may then be moved to a location proximate a processing chamber, such as a chemical vapor deposition reactor, and processed and unprocessed wafers efficiently exchanged by the transport assembly.
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Solid State Technology, "Wafer Handling Robot", Copyright Jan. 1985.
"The Dawn of Epitaxy's New Era", May 1986, Semiconductor Intnl., pp. 69-72.
"Next Generation Epitaxial Silicon Deposition System", May 1986, Semiconductor International, pp. 250-251.
Cardema Rudolfo S.
Ramiller Charles L.
Wooding Michael J.
Tetron, Inc.
Werner Frank E.
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