Method and system for loading wafers

Material or article handling – Device for emptying portable receptacle – Nongravity type

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414627, 4147448, 414225, 414217, 414737, 414680, 414752, 901 6, B65G 4791

Patent

active

048864129

ABSTRACT:
A wafer transport system includes a mobile frame, a wafer cassette conveyor, a wafer support table, and a wafer transfer assembly. The wafer cassette conveyor carries a plurality of wafer cassettes and presents them successively to a transfer location. The wafer transport assembly, including a robotic arm and a vacuum pickup element, is then able to transport individual wafers from the cassettes to the support table. By rotating the support table, a plurality of wafers can be placed in a desired order. The wafer support table may then be moved to a location proximate a processing chamber, such as a chemical vapor deposition reactor, and processed and unprocessed wafers efficiently exchanged by the transport assembly.

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Solid State Technology, "Wafer Handling Robot", Copyright Jan. 1985.
"The Dawn of Epitaxy's New Era", May 1986, Semiconductor Intnl., pp. 69-72.
"Next Generation Epitaxial Silicon Deposition System", May 1986, Semiconductor International, pp. 250-251.

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