Method and system for loading substrate supports into a...

Electric resistance heating devices – Heating devices – Radiant heater

Reexamination Certificate

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C392S407000

Reexamination Certificate

active

10913945

ABSTRACT:
Wafer supports are provided that have a diameter smaller than the diameter of the wafer that they are to support in a wafer boat. The perimeter of the wafer support is preferably continuous, extending completely around in a 360° span, and is sized to fit between the protrusions supporting a particular wafer in a wafer cassette. To load the wafer boat, an end effector removes the wafer support from a wafer boat and moves the wafer support into a wafer cassette, where the end effector moves upward to seat a wafer upon the wafer support. The wafer and wafer support are then transported to the wafer boat and the wafer support and the wafer are lowered onto a wafer slot surface in a wafer slot in the wafer boat, to transfer the wafer support and wafer from the end effector to the wafer boat.

REFERENCES:
patent: 4407654 (1983-10-01), Irwin
patent: 4468259 (1984-08-01), Mimura
patent: 4770590 (1988-09-01), Hugues et al.
patent: 4900214 (1990-02-01), Ben
patent: 5028195 (1991-07-01), Ishii et al.
patent: 5071485 (1991-12-01), Matthews et al.
patent: 5110248 (1992-05-01), Asano et al.
patent: 5162047 (1992-11-01), Wada et al.
patent: 5178639 (1993-01-01), Nishi
patent: 5192371 (1993-03-01), Shuto et al.
patent: 5219079 (1993-06-01), Nakamura
patent: 5310339 (1994-05-01), Ushikawa
patent: 5316472 (1994-05-01), Niino et al.
patent: 5334257 (1994-08-01), Nishi et al.
patent: 5407449 (1995-04-01), Zinger
patent: 5482558 (1996-01-01), Watanabe et al.
patent: 5482559 (1996-01-01), Imai et al.
patent: 5492229 (1996-02-01), Tanaka et al.
patent: 5556147 (1996-09-01), Somekh et al.
patent: 5556275 (1996-09-01), Sakata et al.
patent: 5664925 (1997-09-01), Muka et al.
patent: 5820367 (1998-10-01), Osawa
patent: 5858103 (1999-01-01), Nakajima et al.
patent: 5865321 (1999-02-01), Tomanovich
patent: 5879459 (1999-03-01), Gadgil et al.
patent: 5897311 (1999-04-01), Nishi
patent: 5931666 (1999-08-01), Hengst
patent: 5974682 (1999-11-01), Akimoto
patent: 5981966 (1999-11-01), Honma
patent: 5983906 (1999-11-01), Zhao et al.
patent: 6034000 (2000-03-01), Heyder et al.
patent: 6068441 (2000-05-01), Raaijmakers et al.
patent: 6099302 (2000-08-01), Hong et al.
patent: 6111225 (2000-08-01), Ohkase et al.
patent: 6168668 (2001-01-01), Yudovsky
patent: 6203617 (2001-03-01), Tanoue et al.
patent: 6216883 (2001-04-01), Kobayashi et al.
patent: 6280183 (2001-08-01), Mayur et al.
patent: 6287112 (2001-09-01), Van Voorst Vader et al.
patent: 6321680 (2001-11-01), Cook et al.
patent: 6341935 (2002-01-01), Tseng
patent: 6347919 (2002-02-01), Ryan et al.
patent: 6361313 (2002-03-01), Beyaert et al.
patent: 6375403 (2002-04-01), Mages et al.
patent: 6390753 (2002-05-01), De Ridder
patent: 6399922 (2002-06-01), Okase et al.
patent: 6462411 (2002-10-01), Watanabe et al.
patent: 6464445 (2002-10-01), Knapik et al.
patent: 6559039 (2003-05-01), Wang et al.
patent: 6753506 (2004-06-01), Liu et al.
patent: 2002/0182892 (2002-12-01), Arai et al.
patent: 2003/0180125 (2003-09-01), Van den Berg et al.
patent: 2004/0040632 (2004-03-01), Oosterlaken
patent: 0 238 751 (1987-09-01), None
patent: 0 405 301 (1991-01-01), None
patent: 0 821 403 (1998-01-01), None
patent: 63102225 (1988-05-01), None
patent: 02002033284 (2002-01-01), None
patent: WO 00/68977 (2000-11-01), None

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