Method and system for large scale manufacture of thin film...

Details Method and system for large scale manufacture of thin film... Method and system for large scale manufacture of thin film...

2011-08-16

2011-08-16

Lee, Hsien-ming (Department: 2823)

Semiconductor device manufacturing: process

Making device or circuit emissive of nonelectrical signal

C438S029000, C438S046000, C438S047000, C438S074000, C438S095000, C257S040000, C257SE33001, C257SE25008, C257SE51018, C313S504000, C313S506000, C428S690000

Reexamination Certificate

active

07998762

ABSTRACT:
A method for large scale manufacture of photovoltaic devices includes loading a substrate into a load lock station and transferring the substrate in a controlled ambient to a first process station. The method includes using a first physical deposition process in the first process station to cause formation of a first conductor layer overlying the surface region of the substrate. The method includes transferring the substrate to a second process station, and using a second physical deposition process in the second process station to cause formation of a second layer overlying the surface region of the substrate. The method further includes repeating the transferring and processing until all thin film materials of the photovoltaic devices are formed. In an embodiment, the invention also provides a method for large scale manufacture of photovoltaic devices including feed forward control. That is, the method includes in-situ monitoring of the physical, electrical, and optical properties of the thin films. These properties are used to determine and adjust process conditions for subsequent processes.

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