Method and system for interferometric height measurement

Details Method and system for interferometric height measurement Method and system for interferometric height measurement

2006-07-05

2008-07-08

Turner, Samuel A. (Department: 2877)

Optics: measuring and testing

By light interference

Having polarization

C356S516000

Reexamination Certificate

active

07397569

ABSTRACT:
A system and method for interferometric height measurement. A first coherent light beam and a second coherent light beam is generated. At least the first coherent light beam is reflected from a first region into a first return beam and the second coherent light beam is reflected from a second region into a second return beam. At least a first reflectivity of the first region is measured. A topography-dependent phase shift of the first return beam and the second return beam is determined with reference to a curve relating the first reflectivity to a material-dependent phase shift. A height based on the topography-dependent phase shift is measured.

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