Method and system for inspecting specimen

Details Method and system for inspecting specimen Method and system for inspecting specimen

2008-06-17

2008-06-17

Hollington, Jermele M (Department: 2829)

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

Reexamination Certificate

active

07388365

ABSTRACT:
Method and system for obtaining a potential distribution image of a specimen using two probes having two probes contacted with a patterned surface of the specimen, a scanning unit for scanning a beam of electrons or ions over the specimen, a potential detection unit for detecting the electric potential at an arbitrary position on the specimen using the probes, and an acquisition unit for obtaining a potential distribution image of the specimen while synchronizing the output from the potential detection unit with the scanning of the beam.

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