Method and system for inspecting polished surface texture

Details Method and system for inspecting polished surface texture Method and system for inspecting polished surface texture

1994-08-25

1996-07-09

Rosenberger, Richard A.

Optics: measuring and testing

By polarized light examination

With light attenuation

G01B 1130

Patent

active

055350054

ABSTRACT:
A method for obtaining texture measurements of a highly-polished surface (110) uses a directed-energy light source (124) to perform the steps of scattering the directed-energy light from a plurality of known texture surfaces. The known texture surfaces have equivalent surface area and dimensions to those of the highly-polished surface (110). A next step is to measure (102 and 130) the scattered light from the directed-energy light source (124) to establish a threshold energy level measurement (48, 50, or 52) above which the measured scattered light varies according to differences in texture among the plurality of known texture surfaces. From variations in the measured scattered light a texture-light relationship (Equation 1) is established that expresses expected changes in measured scattered light according to changes in texture in the plurality of known texture surfaces. Scattered light from the highly-polished surface (110) is then measured. A texture measurement is then generated by applying the texture-light relationship (Equation 1) to the measured scattered light from the highly-polished surface (110).

REFERENCES:
patent: 4376583 (1983-03-01), Alford et al.
patent: 5293216 (1994-03-01), Moslehi

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