Method and system for inspecting parts utilizing triangulation

Optics: measuring and testing – Shape or surface configuration – Triangulation

Reexamination Certificate

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C356S606000

Reexamination Certificate

active

07812970

ABSTRACT:
A method and system for inspecting parts utilizing triangulation are provided. The system includes a part support subsystem including a fixture for supporting a part to be inspected and a head apparatus. The head apparatus includes at least one radiation source for directing a plane of radiation at the part so that the part occludes the plane of radiation to create unobstructed planar portions of the plane of radiation wherein each of the unobstructed planar portions of the plane of radiation contains an amount of radiation which is representative of a respective geometric dimension of the part. The head apparatus also includes at least one receiver module for measuring the amount of radiation present in each of the unobstructed planar portions and a triangulation-based sensor to illuminate the part with a beam of electromagnetic energy to obtain a reflected beam of electromagnetic energy and to sense at least one portion of the reflected beam of electromagnetic energy. The system further includes a movable stage subsystem coupled to the head apparatus for translating the head apparatus relative to the part so that the plane of radiation and the beam of electromagnetic energy linearly scan the part supported by the fixture and a controller for generating control signals to control linear movement of the stage subsystem during the linear scan.

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