Optics: measuring and testing – By dispersed light spectroscopy – For spectrographic investigation
Reexamination Certificate
2006-10-11
2011-11-22
Chowdhury, Tarifur (Department: 2886)
Optics: measuring and testing
By dispersed light spectroscopy
For spectrographic investigation
Reexamination Certificate
active
08064054
ABSTRACT:
Methods (600) and systems (100) for inspecting an indirect bandgap semiconductor structure (140) are described. A light source (110) generates light (612) suitable for inducing photoluminescence in the indirect bandgap semiconductor structure (140). A short-pass filter unit (114) reduces long-wavelength light of the generated light above a specified emission peak. A collimator (112) collimates (616) the light. A large area of the indirect bandgap semiconductor structure (140) is substantially uniformly and simultaneously illuminated (618) with the collimated, short-pass filtered light. An image capture device (130) captures (620) images of photoluminescence simultaneously induced by the substantially uniform, simultaneous illumination incident across the large area of the indirect bandgap semiconductor structure. The photoluminescence images are imaged processed (622) to quantify spatially resolved specified electronic properties of the indirect bandgap semiconductor structure (140) using the spatial variation of the photoluminescence induced in the large area.
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Bardos Robert Andrew
Trupke Thorsten
BT Imaging Pty Ltd
Chowdhury Tarifur
Fish & Richardson P.C.
Nur Abdullahi
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