Method and system for increasing beam current above a...

Details Method and system for increasing beam current above a... Method and system for increasing beam current above a...

2009-10-30

2011-10-11

Souw, Bernard E (Department: 2881)

Radiant energy

Ionic separation or analysis

Methods

C250S492210

Reexamination Certificate

active

08035080

ABSTRACT:
Methods and a system of an ion implantation system are disclosed that are capable of increasing beam current above a maximum kinetic energy of a first charge state from an ion source without changing the charge state at the ion source. Positive ions having a first positive charge state are selected into an accelerator. The positive ions of the first positive charge state are accelerated in acceleration stages and stripped to convert them to positive ions of a second charge state. A second kinetic energy level higher than the maximum kinetic energy level of the first charge state can be obtained.

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