Method and system for high-speed, precise micromachining an...

Electric heating – Metal heating – By arc

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C219S121680, C438S013000

Reexamination Certificate

active

06951995

ABSTRACT:
A method and system for high-speed, precise micromachining an array of devices are disclosed wherein improved process throughput and accuracy, such as resistor trimming accuracy, are provided. The number of resistance measurements are limited by using non-measurement cuts, using non-sequential collinear cutting, using spot fan-out parallel cutting, and using a retrograde scanning technique for faster collinear cuts. Non-sequential cutting is also used to manage thermal effects and calibrated cuts are used for improved accuracy. Test voltage is controlled to avoid resistor damage.

REFERENCES:
patent: 4399345 (1983-08-01), Lapham et al.
patent: 4429298 (1984-01-01), Oberholzer
patent: 4511607 (1985-04-01), White
patent: 4551607 (1985-11-01), Moy
patent: 4647899 (1987-03-01), Moy
patent: 4853671 (1989-08-01), Iversen et al.
patent: 4901052 (1990-02-01), Chapel et al.
patent: 4962294 (1990-10-01), Beckham et al.
patent: 5087987 (1992-02-01), Simbal
patent: 5104480 (1992-04-01), Wojarowski et al.
patent: 5111325 (1992-05-01), DeJager
patent: 5233327 (1993-08-01), Bartush et al.
patent: 5404247 (1995-04-01), Cobb et al.
patent: 5569398 (1996-10-01), Sun et al.
patent: 5633736 (1997-05-01), Griffith et al.
patent: 5675310 (1997-10-01), Wojarowski et al.
patent: 5685995 (1997-11-01), Sun et al.
patent: 5751585 (1998-05-01), Cutler et al.
patent: 5753391 (1998-05-01), Stone et al.
patent: 5796392 (1998-08-01), Eglit
patent: 5808272 (1998-09-01), Sun et al.
patent: 5835280 (1998-11-01), Griffith
patent: 5838355 (1998-11-01), Narayan et al.
patent: 5849623 (1998-12-01), Wojarowski et al.
patent: 5864430 (1999-01-01), Dickey et al.
patent: 5865832 (1999-02-01), Knopp et al.
patent: 5969877 (1999-10-01), Maeda
patent: 5976392 (1999-11-01), Chen
patent: 6031561 (2000-02-01), Narayan et al.
patent: 6281471 (2001-08-01), Smart
patent: 6294778 (2001-09-01), Cappiello
patent: 6322711 (2001-11-01), Chen
patent: 6462306 (2002-10-01), Kitai et al.
patent: 6510605 (2003-01-01), Smejkal et al.
patent: 6534743 (2003-03-01), Swenson et al.
patent: 6664500 (2003-12-01), Wilbur et al.
patent: 6703582 (2004-03-01), Smart et al.
patent: 6727458 (2004-04-01), Smart
patent: 6738396 (2004-05-01), Filgas et al.
patent: 2001/0045419 (2001-11-01), Dunsky et al.
patent: 2003/0042230 (2003-03-01), Gross et al.
patent: 2003/0172527 (2003-09-01), Rital et al.
patent: 2003/0178396 (2003-09-01), Navmov et al.
patent: 2004/0009618 (2004-01-01), Couch et al.
patent: 62160726 (1987-07-01), None
patent: 2005-104266 (1993-04-01), None
patent: WO 9940591 (1999-08-01), None
patent: WO 0073013 (2000-12-01), None
Wagner, Richard, Functional Laser Trim Architecture—Tuned for Speed and Accuracy, Westwood, Massachusetts, Hybrid Circuit Technology, Jul. 1985, pp. 1-5.
Aghamirzadeh, Maryam, Choosing the Right Laser for Trim Quality, Hybrid Circuit Technology, Jul. 1985, pp. 1-3.
Dow, Robert, et al., Reducing Post-Trim Drift of Thin-Film Resistors by Optimizing YAG Laser Output Characteristics, IEEE Transactions on Components, Hybrids, J. Mfg. Tech., vol. CHMT-1, Dec. 1978, PP. 392-397.
Link Cutting/Making, Handbook Of Laser Materials Processing, Chapter 19, pp. 595-615, Laser Institute of America (2001).
Trimming, LIA Handbook of Laser Materials Processing, Chapter 17, pp. 583-588.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Method and system for high-speed, precise micromachining an... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method and system for high-speed, precise micromachining an..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and system for high-speed, precise micromachining an... will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-3444148

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.