Electric heating – Metal heating – By arc
Reexamination Certificate
2005-10-04
2005-10-04
Ghyka, Alexander (Department: 2812)
Electric heating
Metal heating
By arc
C219S121680, C438S013000
Reexamination Certificate
active
06951995
ABSTRACT:
A method and system for high-speed, precise micromachining an array of devices are disclosed wherein improved process throughput and accuracy, such as resistor trimming accuracy, are provided. The number of resistance measurements are limited by using non-measurement cuts, using non-sequential collinear cutting, using spot fan-out parallel cutting, and using a retrograde scanning technique for faster collinear cuts. Non-sequential cutting is also used to manage thermal effects and calibrated cuts are used for improved accuracy. Test voltage is controlled to avoid resistor damage.
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Chu Yun Fee
Couch Bruce L.
Ehrmann Jonathan S.
Johnson Shepard D.
Lento Joseph V.
Brooks & Kushman P.C.
Ghyka Alexander
GSI Lumonics Corp.
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