Method and system for generating and reviewing a thin sample

Details Method and system for generating and reviewing a thin sample Method and system for generating and reviewing a thin sample

2007-09-25

2010-02-09

Berman, Jack I (Department: 2881)

Radiant energy

Methods including separation or nonradiant treatment of test...

C250S306000, C250S307000, C250S309000, C250S310000, C250S311000

Reexamination Certificate

active

07659506

ABSTRACT:
A system and method for generating a thin sample, the method includes: milling an intermediate section of a thin sample such as to enable an upper portion of the thin sample to tilt in relation to a lower portion of the thin sample; wherein the lower portion is connected to a wafer from which the thin sample was formed. A system and method for inspecting a thin sample, the method includes: A method for inspecting a thin sample, the method comprising: illuminating, by a charged particle beam, a tilted upper portion of a thin sample that is connected, via a milled intermediate section, to a lower portion of the thin sample; wherein the lower portion is connected to a wafer from which the thin sample was formed; and collecting particles and photons resulting from the illumination.

REFERENCES:
patent: 6670610 (2003-12-01), Shemesh et al.
patent: 7005636 (2006-02-01), Tappel
patent: 2004/0016880 (2004-01-01), Reiner et al.
patent: 2006/0011867 (2006-01-01), Kidron et al.

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