Fluid handling – Processes – With control of flow by a condition or characteristic of a...
Reexamination Certificate
2004-09-21
2008-09-16
Rivell, John (Department: 3753)
Fluid handling
Processes
With control of flow by a condition or characteristic of a...
C137S002000, C137S486000, C137S487500, C073S001160, C073S861430
Reexamination Certificate
active
07424895
ABSTRACT:
Systems and methods for flow verification and validation of mass flow controllers are disclosed. A mass flow controller may be commanded to a specified flow and flow measurement commenced. During an interval, gas is accumulated in a first volume and measurements taken within this volume. The various measurements taken during the interval may then be used to calculate the flow rate. The flow rate, in turn, may be used to determine the accuracy of the mass flow controller relative to a setpoint.
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International Search Report and Written Opinion for PCT/US05/24084, Dec. 18, 2006.
Barker James
Sukumaran Sandeep
Tison Stuart A.
Celerity, Inc.
Lowrie Lando & Anastasi, LLP
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