Metal treatment – Process of modifying or maintaining internal physical... – With measuring – testing – or sensing
Reexamination Certificate
2007-09-11
2007-09-11
Kastler, Scott (Department: 1742)
Metal treatment
Process of modifying or maintaining internal physical...
With measuring, testing, or sensing
C205S080000
Reexamination Certificate
active
10712147
ABSTRACT:
A method of fabricating a three-dimensional microstructure provides data corresponding to information relating to the structure of a three-dimensional microstructure design. A sample is processed in accordance with the provided data by irradiating the sample with a charged-particle beam while controlling processing conditions of the charged-particle beam. Dimensions of the processed sample are compared with the provided data to identify differences between the structure of the processed sample and the structure of the three-dimensional microstructure design. The sample is then irradiated again with a charged-particle beam to correct the identified structural differences while adjusting the processing conditions of the charged-particle beam to thereby fabricate a three-dimensional microstructure having a structure substantially the same as the structure of the three-dimensional microstructure design.
REFERENCES:
patent: 5641391 (1997-06-01), Hunter et al.
patent: 6875544 (2005-04-01), Sweatt et al.
patent: 2002/0053643 (2002-05-01), Tanaka et al.
patent: 2004/0099636 (2004-05-01), Scipioni
Adams & Wilks
Kastler Scott
SII NanoTechnology Inc.
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