Method and system for estimating microelectronic fabrication...

Details Method and system for estimating microelectronic fabrication... Method and system for estimating microelectronic fabrication...

2005-06-21

2005-06-21

Picard, Leo (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C702S081000, C700S108000

Reexamination Certificate

active

06909931

ABSTRACT:
Within a method for estimating a microelectronic fabrication product yield and a system for estimating the microelectronic fabrication product yield there is employed a specific mathematic algorithm for estimating yield of a new microelectronic fabrication product within at least one microelectronic fabrication facility. The specific algorithm is solved incident to parametric data correlation with existing production data within the at least one microelectronic fabrication facility.

REFERENCES:
patent: 5754432 (1998-05-01), Komatsuzaki et al.
patent: 5773315 (1998-06-01), Jarvis
patent: 5946214 (1999-08-01), Heavlin et al.
patent: 6368884 (2002-04-01), Goodwin et al.
patent: 0 872 883 (1998-10-01), None

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