Method and system for electronic detection of mechanical...

Details Method and system for electronic detection of mechanical... Method and system for electronic detection of mechanical...

2007-01-02

2007-01-02

Hirshfeld, Andrew H. (Department: 2858)

Electricity: measuring and testing

Determining nonelectric properties by measuring electric...

C324S071400, C073S105000, C073S580000

Reexamination Certificate

active

10996274

ABSTRACT:
A sensor for detecting mechanical perturbations represented by a change in an electrical signal includes a structure such as a cantilever, membrane, etc. and a field effect transistor such as a MOSFET embedded in the structure. The drain current of the embedded transistor changes with mechanical perturbations in the structure caused, for example, by a bio-chemical interaction being sensed. A scanning probe microscope utilizes the embedded MOSFET with a BiMOS actuator.

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