Coating processes – With post-treatment of coating or coating material – Coating material recirculation or regeneration
Reexamination Certificate
2005-02-15
2008-10-14
Koch, III, George R (Department: 1791)
Coating processes
With post-treatment of coating or coating material
Coating material recirculation or regeneration
C427S299000, C427S427200, C134S018000, C134S108000
Reexamination Certificate
active
07435447
ABSTRACT:
In a high pressure processing system configured to treat a substrate, a flow measurement device is utilized to determine a flow condition in the high pressure processing system. The flow measurement device can, for example, comprise a turbidity meter. The flow parameter can, for example, include a volume flow rate or a time to achieve mixing of a process chemistry within a high pressure fluid used to treat the substrate.
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Koch, III George R
Tokyo Electron Limited
Wood Herron & Evans L.L.P.
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