Method and system for determining dimensions of optically...

Details Method and system for determining dimensions of optically... Method and system for determining dimensions of optically...

2005-08-09

2005-08-09

Pham, Hoa Q. (Department: 2877)

Optics: measuring and testing

Dimension

Thickness

C356S614000, C250S22300B, C250S559360

Reexamination Certificate

active

06927864

ABSTRACT:
A method and system for determining dimensions of optically recognizable features provides a low-cost and efficient high speed/high resolution measurement system for determining surface feature dimensions. Multiple imaging subsystems are arranged at predetermined differing angles above a surface under test. A scanning subsystem moves either the imaging subsystems or the surface under test and a processor coupled to the imaging subsystems determines the height of a surface feature by determining the deviations between the outputs of the imaging systems as an edge of the surface feature passes within the optical paths of the imaging subsystems.

REFERENCES:
patent: 3892492 (1975-07-01), Eichenberger
patent: 4063820 (1977-12-01), Borgese
patent: 4105925 (1978-08-01), Rossol et al.
patent: 4112309 (1978-09-01), Nakazawa et al.
patent: 4286149 (1981-08-01), Ben-Nathan et al.
patent: 4573073 (1986-02-01), Corby, Jr.
patent: 5659396 (1997-08-01), Mondie
patent: 5812269 (1998-09-01), Svetkoff et al.

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