Method and system for determining condition of process...

Details Method and system for determining condition of process... Method and system for determining condition of process...

2007-08-01

2010-06-08

Toatley, Jr., Gregory J (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S237400, C356S237500

Reexamination Certificate

active

07733472

ABSTRACT:
A method is used for determining a condition of a predetermined process for preparing a process target, which includes a coating film formed on a substrate and including a resist film. This is to prevent film peeling from occurring in the coating film when performing immersion light exposure after the predetermined process. The method includes preparing test targets, each of which includes a sample film corresponding to the coating film and formed on a sample substrate corresponding to the substrate; performing a test process on each of the test targets in a testing unit, which imitates an immersion light exposure apparatus, under a condition corresponding to a designated immersion light exposure condition; and determining a condition of the predetermined process to be used for the coating film, based on a result of the test process.

REFERENCES:
patent: 5891348 (1999-04-01), Ye et al.
patent: 6005978 (1999-12-01), Garakani
patent: 2006/0231206 (2006-10-01), Nagasaka et al.

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