Method and system for detecting tool errors to stop a...

Details Method and system for detecting tool errors to stop a... Method and system for detecting tool errors to stop a...

2011-03-15

2011-03-15

Decady, Albert (Department: 2121)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S080000, C700S083000, C700S108000, C700S121000, C438S016000

Reexamination Certificate

active

07908024

ABSTRACT:
A method for detecting tool errors to stop a process recipe for a single chamber is disclosed. When a recipe error for one of chamber of a process tool is detected, only the chamber with the recipe error is terminated and other chambers are allowed to proceed with their recipe processes for preventing excursions.

REFERENCES:
patent: 6365425 (2002-04-01), Ikota et al.
patent: 6671570 (2003-12-01), Schulze
patent: 6738731 (2004-05-01), Riley et al.
patent: 6826437 (2004-11-01), Hobbs et al.
patent: 6952656 (2005-10-01), Cordova et al.
patent: 7043384 (2006-05-01), Matsushita et al.
patent: 7082345 (2006-07-01), Shanmugasundram et al.
patent: 7123980 (2006-10-01), Funk et al.
patent: 7324855 (2008-01-01), Ushiku et al.
patent: 7534725 (2009-05-01), Shen et al.
patent: 7624003 (2009-11-01), Yamartino
patent: 7636608 (2009-12-01), Funk et al.
patent: 7672747 (2010-03-01), Huang et al.
patent: 2002/0116083 (2002-08-01), Schulze

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