Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2007-08-28
2007-08-28
Picard, Leo (Department: 2125)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S105000, C700S179000, C438S014000
Reexamination Certificate
active
10979381
ABSTRACT:
The present invention is generally directed to methods and systems for converting tool processing ability based upon work in progress considerations. In one illustrative embodiment, the method includes identifying a plurality of wafers to be processed in one of a plurality of tools, identifying, on a collective basis, a number of different process operations to be performed in processing the wafers and a number of wafers to be processed in accordance with each of the different process operations, changing a processing ability of at least one of the tools based upon the number of wafers to be processed in accordance with the different process operations, and processing at least one of the wafers in at least one of the tools wherein the processing ability was changed. In other embodiments, the method comprises changing the processing ability of at least one of the tools such that the processing ability of the tools, considered collectively, is correlated with the number of wafers to be processed in accordance with each of the different process operations.
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Tanzer Troy Anthony
Weaver Elizabeth
Advanced Micro Devices , Inc.
Kasenge Charles
Picard Leo
Williams Morgan & Amerson P.C.
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