Method and system for controlling the relative size of images fo

Details Method and system for controlling the relative size of images fo Method and system for controlling the relative size of images fo

1996-11-20

1998-06-09

Rutledge, D.

Photocopying

Projection printing and copying cameras

Step and repeat

G03B 2742

Patent

active

057643423

ABSTRACT:
A method of exposing a radiation-sensitive medium through a mask and using an imaging system having a given depth of focus to control for pattern dependent distortion. The steps comprise: providing the radiation-sensitive medium within the depth of focus of the imaging system; providing radiation to the radiation-sensitive medium through the mask; providing the radiation-sensitive medium fully outside the depth of focus of the imaging system; and providing radiation to the radiation-sensitive medium through the mask. Corrections are automatically made by providing the radiation-sensitive medium fully outside the depth of focus of the imaging system, since in that regime the mask operates as a grey-scale mask, with the amount of light passing through any region of the mask dependent on the transmission of the masking pattern in that region.

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