Radiation imagery chemistry: process – composition – or product th – Plural exposure steps
Patent
1996-11-20
1999-09-14
Duda, Kathleen
Radiation imagery chemistry: process, composition, or product th
Plural exposure steps
430396, 430311, G03F 720, G03F 7207
Patent
active
059521600
ABSTRACT:
A method of exposing a radiation-sensitive medium through a mask and using an imaging system having a given depth of focus to control for pattern dependent distortion. The steps comprise: providing the radiation-sensitive medium within the depth of focus of the imaging system; providing radiation to the radiation-sensitive medium through the mask; providing the radiation-sensitive medium fully outside the depth of focus of the imaging system; and providing radiation to the radiation-sensitive medium through the mask. Corrections are automatically made by providing the radiation-sensitive medium fully outside the depth of focus of the imaging system, since in that regime the mask operates as a gray-scale mask, with the amount of light passing through any region of the mask dependent on the transmission of the masking pattern in that region.
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Bakeman, Jr. Paul Evans
Bergendahl Albert Stephan
Duda Kathleen
International Business Machines - Corporation
Leas James M.
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