Method and system for controlling the chemical mechanical...

Details Method and system for controlling the chemical mechanical... Method and system for controlling the chemical mechanical...

2007-04-03

2007-04-03

Rose, Robert A. (Department: 3723)

Abrading

Precision device or process - or with condition responsive...

Computer controlled

C451S041000, C451S021000

Reexamination Certificate

active

10987804

ABSTRACT:
In a system and a method according to the present invention, a seismic signal from a seismic sensor coupled to a drive assembly of a pad conditioning system is used to estimate the status of one or more consumables in a CMP system.

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