Data processing: generic control systems or specific application – Specific application – apparatus or process – Specific application of control based on elapsed time
Reexamination Certificate
2011-02-08
2011-02-08
DeCady, Albert (Department: 2121)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Specific application of control based on elapsed time
Reexamination Certificate
active
07885728
ABSTRACT:
A method for controlling a semiconductor manufacturing apparatus in a wait mode, including: obtaining information regarding a waiting time required for a product to arrive at the apparatus on a production line, the product being subjected to a predetermined process by the semiconductor manufacturing apparatus; obtaining information regarding a time required to control energy saving between lowering electric power and other energy used by the semiconductor manufacturing apparatus in the wait mode to a level at which the processing is not ready and raising the electric power and the other energy to a processable level at which the product processing is ready; and judging whether or not to execute the energy saving control of the semiconductor manufacturing apparatus based on results of comparison of the required time with the waiting time and of estimation on an effect of energy saving obtained by executing the energy saving control during the waiting time.
REFERENCES:
patent: 6356804 (2002-03-01), Conboy et al.
patent: 6937917 (2005-08-01), Akiyama et al.
patent: 6986261 (2006-01-01), Sasaki et al.
patent: 6990747 (2006-01-01), Kitoku et al.
patent: 7201851 (2007-04-01), Kitoku et al.
patent: 7684903 (2010-03-01), Tomine
patent: 2006/0143706 (2006-06-01), Kawasaki et al.
patent: 05-077144 (1993-03-01), None
patent: 11-057667 (1999-03-01), None
patent: 2000-260672 (2000-09-01), None
patent: 2002-120435 (2002-04-01), None
De'cady Albert
Harness & Dickey & Pierce P.L.C.
Rapp Chad
Seiko Epson Corporation
LandOfFree
Method and system for controlling semiconductor... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method and system for controlling semiconductor..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and system for controlling semiconductor... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2641710