Method and system for controlling process tools by...

Details Method and system for controlling process tools by... Method and system for controlling process tools by...

2007-01-03

2009-08-04

Barnes-Bullock, Crystal J (Department: 2121)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S121000, C700S218000, C710S260000

Reexamination Certificate

active

07571020

ABSTRACT:
By enabling an interleaved mode when supplying substrates from a plurality of load ports to a respective process module, a reduction of non-productive time of the process tool and/or a reduction of cycle time may be achieved compared to a conventional sequential processing of carriers. Upon arrival at a load port of the process tool, an appropriate priority may be assigned to the carrier, wherein a higher priority may enable the interruption of the processing of a lower-ranked substrate carrier.

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