Refrigeration – Automatic control – Refrigeration producer
Reexamination Certificate
2006-01-17
2006-01-17
Norman, Marc (Department: 3744)
Refrigeration
Automatic control
Refrigeration producer
C062S180000, C062S185000, C062S259200, C165S268000, C361S699000
Reexamination Certificate
active
06986261
ABSTRACT:
A semiconductor processing system includes a control section that refers to recipe information on a process sequence, thereby detects that a processing apparatus will shift from an ordinary operation state to a long idle state, and switches thermo-medium circulation apparatus from an ordinary mode to an energy-saving mode after the shift to the long idle state. The control section refers to recipe information on the process sequence or another process sequence, thereby detects that the processing apparatus will shift from the long idle state to the ordinary operation state, and switches the thermo-medium circulation apparatus from the energy-saving mode to the ordinary mode before the shift to the ordinary operation state. A thermo-medium is circulated at a first flow rate and at a second flow rate smaller than the first flow rate in the ordinary mode and the energy-saving mode, respectively.
REFERENCES:
patent: 5724825 (1998-03-01), Lee et al.
patent: 6684652 (2004-02-01), Kim et al.
patent: 2004/0070938 (2004-04-01), Hazelton et al.
patent: 2001-44176 (2001-02-01), None
Amikura Norihiko
Koizumi Hiroshi
Sasaki Norikazu
Norman Marc
Tokyo Electron Limited
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