Method and system for controlling bake plate temperature in...

Details Method and system for controlling bake plate temperature in... Method and system for controlling bake plate temperature in...

2007-09-04

2010-11-09

Robinson, Daniel (Department: 3742)

Electric resistance heating devices

Heating devices

Radiant heater

C219S405000, C118S725000

Reexamination Certificate

active

07831135

ABSTRACT:
A method of operating a bake plate disposed in a semiconductor processing chamber having a face plate opposing the bake plate includes providing a temperature control signal to the bake plate and measuring a face plate temperature associated with the face plate. The method also includes determining a difference between the face plate temperature and a predetermined temperature and modifying the temperature control signal provided to the bake plate in response to the determined difference.

REFERENCES:
patent: 6323463 (2001-11-01), Davis et al.
patent: 6767752 (2004-07-01), Nakano et al.
patent: 2002/0008099 (2002-01-01), Davis et al.
patent: 2006/0130750 (2006-06-01), Ishikawa et al.
patent: 2009/0183677 (2009-07-01), Tian et al.

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