Method and system for controlling a semiconductor...

Details Method and system for controlling a semiconductor... Method and system for controlling a semiconductor...

2011-06-21

2011-06-21

Garber, Charles D (Department: 2812)

Semiconductor device manufacturing: process

Making device or circuit emissive of nonelectrical signal

Making emissive array

Reexamination Certificate

active

07964422

ABSTRACT:
A method for controlling a semiconductor fabrication process includes the steps of analyzing process-data related to an intermediate-process-step in the fabrication process and adjusting a metal-layer-parameter corresponding to the metal layer based on the process-data.

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patent: 7176133 (2007-02-01), Hues et al.
patent: 2004/0115843 (2004-06-01), Wack et al.

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