Method and system for controlling a product parameter of a...

Details Method and system for controlling a product parameter of a... Method and system for controlling a product parameter of a...

2007-11-20

2007-11-20

Bahta, Kidest (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S098000, C702S187000

Reexamination Certificate

active

11030863

ABSTRACT:
Methods and systems are disclosed that allow an adjustment of a product parameter, such as operating speed, of a circuit element, such as a field effect transistor, during the fabrication of the device. A manufacturing process downstream of a first controlled process is controlled by a superior control scheme in response to the measurement data of the first and second processes and on the basis of a sensitivity function, which describes the effect a variation of the product parameter generates in the measurement data. The superior control scheme may provide a compensated target value for the downstream process.

REFERENCES:
patent: 5863824 (1999-01-01), Gardner et al.
patent: 6136616 (2000-10-01), Fulford et al.
patent: 6365422 (2002-04-01), Hewett et al.
patent: 6409879 (2002-06-01), Toprac et al.
patent: 6728587 (2004-04-01), Goldman et al.
patent: 6821859 (2004-11-01), Raebiger et al.
patent: 6856849 (2005-02-01), Riley et al.
patent: 6912437 (2005-06-01), Chong et al.
patent: 6959224 (2005-10-01), Good et al.
patent: 2003/0129774 (2003-07-01), Christian et al.
patent: WO 01/97297 (2001-12-01), None
patent: WO 02/09170 (2002-01-01), None
patent: WO 02/082534 (2002-10-01), None

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