Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1990-02-12
1991-07-09
Wieder, Kenneth A.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
324158D, G01R 1512, G01R 3122
Patent
active
050309099
ABSTRACT:
This chip-to-test (1) has a passivation layer and an overlayer at test points (4). The system comprises a vacuum chamber (8), means (2) for mounting and connecting the chip-to-test (1), a pulsed light source means (9) operable to scan the chip-to-test (1) for inducing photoelectron (15) emission therefrom, means (14) for exercising the circuits of the chip-to-test (1), means (18) for detecting the photoelectrons (15), having a detection threshold and delivering a sequence of signals representative of voltages at the currently scanned test point (4') or points as a function of the scanned point or scanning time, means (23) for flooding the chip-to-test (1) with electrons of energy lower than the detection threshold, means (21) for analyzing said sequence of signlas and means (22) for deriving therefrom a capacitive voltage contrast. The material of the overlayer has a work function lower than the photon energy and can be BeO, MgO, CaO, TiO2, more preferably SrO, Cs2O, BaO or a mixture thereof. This system facilitates testing of a chip-to-test whose passivation layer has a work function above the photon energy, and prevents charging-up of the passivation layer.
REFERENCES:
patent: 4296372 (1981-10-01), Feuerbaum
patent: 4350893 (1982-09-01), Takahashi et al.
patent: 4644264 (1987-02-01), Beha et al.
patent: 4703260 (1987-10-01), Beha et al.
patent: 4706018 (1987-11-01), Beha et al.
patent: 4789785 (1988-12-01), Yamazaki et al.
Blancha Armin U.
Clauberg Rolf
Rothauser Ernst H.
Seitz Hugo K.
Goodwin John J.
International Business Machines - Corporation
Nguyen Vinh P.
Wieder Kenneth A.
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